Pointprobe® Series AFM Tips - Special Versions

SuperSharpSilicon^TM Tip (SSS)

For enhanced resolution of microroughness and nanostructures we have developed
an advanced AFM tip manufacturing process leading to a further improvement of the AFM tip
sharpness with AFM tip radii as small as 2 nm.
With these AFM tips we have pushed back the frontiers of technology.

AFM Tip Features
The AFM tip height is 10 - 15 μm and the typical radius of curvature of a SuperSharpSilicon™ tip is about 2 nm. We guarantee an AFM  tip radius smaller than 5 nm (guaranteed yield: 80%).
The half cone angle is smaller than 10° at the last 200 nm of the AFM tip.

High Aspect Ratio AFM Tip (AR5/AR5T)

For measurements on samples with sidewall angles approaching 90°, e.g. deep trench measurements or other semiconductor applications, we offer two different types of High Aspect Ratio AFM Tips showing near vertical sidewalls.
These AFM tips have an overall height of 10 - 15 μm which allows measurements on highly
corrugated samples. At the last few micrometers the AFM tips show a high aspect ratio
portion that is symmetric when viewed from the side as well as along the AFM cantilever
axis. The AFM tip radius is typically 10 nm (smaller than 15 nm guaranteed).

AFM Tip Features
The high aspect ratio portion of the AR5/AR5T tip is larger than 2 μm and shows an
aspect ratio of typically 7:1 (minimum aspect ratio of 5:1 guaranteed).
Consequently the half cone angle of the high aspect ratio portion is typically smaller than 5°. In order to get symmetrical images when scanning deep trenches it is necessary that the AFM tip is perpendicular to the sample. Therefore, in order to compensate the most common tilt angle of 13° used in commercial AFMs, the high aspect ratio portion of the AR5T is tilted 13° with respect to the central axis of the AFM tip.

Diamond Coated Tip (DT), Conductive Diamond Coated Tip (CDT)

For SPM and AFM applications that require hard contact between AFM probe and sample we recommend our Diamond Coated Tip (DT). Some typical applications are friction
force measurements, measurement of the elastic properties of samples, as well as
wear measurements or nanostructuring. The Conductive Diamond Coated Tip (CDT)
additionally offers a conductive, non passivated coating.

AFM Tip and Coating Features
True polycrystalline diamond coating on the tip side of the AFM cantilever with the
unsurpassed hardness of diamond.
The AFM tip height is 10 - 15 μm and the thickness of the diamond layer is approximately
100 nm. The macroscopic AFM tip radius is in the range of 100 - 200 nm, but the AFM tip often exhibits a nanoroughness in the 10 nm regime.
The conductivity of the CDT coating is in the range of 0.003 - 0.005 Ohm•cm