Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling

Piezoelectric biomaterials have attracted great attention owing to the recent recognition of the impact of piezoelectricity on biological systems and their potential applications in implantable sensors, actuators, and energy harvesters. However, their practical use is hindered by the weak piezoelectric effect caused by the random polarization of biomaterials and the challenges of large-scale alignment of domains.*

In the article “Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling” Zhuomin Zhang, Xuemu Li, Zehua Peng, Xiaodong Yan, Shiyuan Liu, Ying Hong, Yao Shan, Xiaote Xu, Lihan Jin, Bingren Liu, Xinyu Zhang, Yu Chai, Shujun Zhang, Alex K.-Y. Jen and Zhengbao Yang present an active self-assembly strategy to tailor piezoelectric biomaterial thin films.*

The nanoconfinement-induced homogeneous nucleation overcomes the interfacial dependency and allows the electric field applied in-situ to align crystal grains across the entire film. The β-glycine films exhibit an enhanced piezoelectric strain coefficient of 11.2 pm V−1 and an exceptional piezoelectric voltage coefficient of 252 × 10−3 Vm N−1. Of particular significance is that the nanoconfinement effect greatly improves the thermostability before melting (192 °C). *

This finding offers a generally applicable strategy for constructing high-performance large-sized piezoelectric bio-organic materials for biological and medical microdevices.*

The piezoelectric properties of the as-prepared β-glycine nanocrystalline films were evaluated by piezoresponse force microscopy (PFM) measurements.*

For all piezoresponse force microscopy (PFM) measurements and SKPM (scanning Kelvin probe force microscopy) measurements mentioned in this article, conductive NanoWorld Arrow-EFM AFM probes with PtIr coating on both AFM cantilever and AFM tip were used. The nominal resonance frequency and the nominal stiffness of the AFM probe are 75 kHz and 2.8 N m−1, respectively.

Figure 3 from “Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling” by Zhuomin Zhang et al.:PFM measurements and polarization alignment studies of β-glycine nanocrystalline films. a The PFM OOP amplitude mapping overlaid on the 3D topography of as-prepared films in a 1.5 × 1.5 µm2 area. The applied AC voltage is 2 V. b The corresponding PFM OOP phase mapping overlaid on the 3D topography. c Histogram calculated from the PFM OOP phase mapping in (b) showing that the β-glycine nanocrystalline films are dominated by domains with the unique polarization direction. d PFM OOP phase mapping of the β-glycine microcrystals obtained by electrohydrodynamic focusing deposition through heterogeneous nucleation. e Histogram calculated from the phase mapping in (d). f Comparison of statistics of the piezoelectric phase for the as-prepared β-glycine nanocrystalline films via synergistic nanoconfinement and in-situ poling (left), and β-glycine microcrystals grown by heterogeneous nucleation in the absence of nanoconfinement effect (right). NanoWorld conductive Arrow-EFM AFM probes were used for the piezoresponse force microscopy (PFM) and scanning Kelvin probe force microscopy (SKPFM) measurements mentioned in this article.
Figure 3 from “Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling” by Zhuomin Zhang et al.:
PFM measurements and polarization alignment studies of β-glycine nanocrystalline films.
a The PFM OOP amplitude mapping overlaid on the 3D topography of as-prepared films in a 1.5 × 1.5 µm2 area. The applied AC voltage is 2 V. b The corresponding PFM OOP phase mapping overlaid on the 3D topography. c Histogram calculated from the PFM OOP phase mapping in (b) showing that the β-glycine nanocrystalline films are dominated by domains with the unique polarization direction. d PFM OOP phase mapping of the β-glycine microcrystals obtained by electrohydrodynamic focusing deposition through heterogeneous nucleation. e Histogram calculated from the phase mapping in (d). f Comparison of statistics of the piezoelectric phase for the as-prepared β-glycine nanocrystalline films via synergistic nanoconfinement and in-situ poling (left), and β-glycine microcrystals grown by heterogeneous nucleation in the absence of nanoconfinement effect (right).

*Zhuomin Zhang, Xuemu Li, Zehua Peng, Xiaodong Yan, Shiyuan Liu, Ying Hong, Yao Shan, Xiaote Xu, Lihan Jin, Bingren Liu, Xinyu Zhang, Yu Chai, Shujun Zhang, Alex K.-Y. Jen and Zhengbao Yang
Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling
Nature Communications volume 14, Article number: 4094 (2023)
DOI: https://doi.org/10.1038/s41467-023-39692-y

Please follow this external link to read the full article: https://rdcu.be/dzddh

The article “Active self-assembly of piezoelectric biomolecular films via synergistic nanoconfinement and in-situ poling” by Zhuomin Zhang, Xuemu Li, Zehua Peng, Xiaodong Yan, Shiyuan Liu, Ying Hong, Yao Shan, Xiaote Xu, Lihan Jin, Bingren Liu, Xinyu Zhang, Yu Chai, Shujun Zhang, Alex K.-Y. Jen and Zhengbao Yang is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third-party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit https://creativecommons.org/licenses/by/4.0/.

NanoWorld at MRS Fall Meeting & Exhibit 2023 this week

NanoWorld CEO Manfred Detterbeck is in Boston for the MRS Fall 2023 Meeting & Exhibit this week. Will you be there too? You’ll meet him at some of the sessions or at NanoAndMore USA booth no. 904.

NanoWorld AFM probes CEO Manfred Detterbeck pointing at the MRS Fall 2023 Meeting & Exhibit sign.
NanoWorld AG CEO Manfred Detterbeck at MRS Fall 2023

C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications

In the search for lead-free, Si-microfabrication-compatible piezoelectric materials, thin films of scandium-doped aluminum nitride (Al,Sc)N are of great interest for use in actuators, energy harvesting, and micro-electromechanical-systems (MEMS).*

While the piezoelectric response of AlN increases upon doping with Sc, difficulties are encountered during film preparation because, as bulk solids with completely different structures and large differences in cation radii, ScN (rock salt, cubic) and AlN (wurtzite, hexagonal) are immiscible. *

Consequently, (Al,Sc)N is inherently thermodynamically unstable and prone to phase segregation. Film preparation is further complicated by the technological requirement for polar [001] or [00 1̲] out-of-plane texture, which is achieved using a seeding layer.*

In the article “C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications” Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky and David Ehre propose a protocol for successfully depositing [001] textured, 2–3 µm thick films of Al0.75Sc0.25N.*

The procedure relies on the fact that sputtered Ti is [001]-textured α-phase (hcp). Diffusion of nitrogen ions into the α-Ti film during reactive sputtering of Al0.75,Sc0.25N likely forms a [111]-oriented TiN intermediate layer. The lattice mismatch of this very thin film with Al0.75Sc0.25N is ~3.7%, providing excellent conditions for epitaxial growth. In contrast to earlier reports, the Al0.75Sc0.25N films prepared in the current study are Al-terminated. Low growth stress (<100 MPa) allows films up to 3 µm thick to be deposited without loss of orientation or decrease in piezoelectric coefficient. *

An advantage of the proposed technique is that it is compatible with a variety of substrates commonly used for actuators or MEMS, as demonstrated here for both Si wafers and D263 borosilicate glass. Additionally, thicker films can potentially lead to increased piezoelectric stress/strain by supporting application of higher voltage, but without increase in the magnitude of the electric field. *

SEM, AFM, EDS, XRD and XPS techniques were used for the film characterization. For the nanoscale topography maps with atomic force microscopy (AFM) NanoWorld Pyrex-Nitride series PNP-TRS silicon nitride AFM probes were used in peak-force tapping mode. *

Figure 3 from Asaf Cohen et al. “C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications”: AFM images of (a) a (100) silicon wafer following cleaning procedures as described in the Materials and Methods section; (b) 50 nm-thick Ti film deposited on the wafer at 300 K; (c) the same film following exposure to N2 plasma at 673 K for 30 min. For the nanoscale topography maps with atomic force microscopy (AFM) NanoWorld Pyrex-Nitride PNP-TRS AFM probes were used in peak-force tapping mode1. *
Figure 3 from Asaf Cohen et al. “C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications”: AFM images of (a) a (100) silicon wafer following cleaning procedures as described in the Materials and Methods section; (b) 50 nm-thick Ti film deposited on the wafer at 300 K; (c) the same film following exposure to N2 plasma at 673 K for 30 min.

*Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky and David Ehre
C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications
Sensors 2022, 22, 7041
DOI: https://doi.org/10.3390/s22187041

The article “C-Axis Textured, 2–3 μm Thick Al0.75Sc0.25N Films Grown on Chemically Formed TiN/Ti Seeding Layers for MEMS Applications” by Asaf Cohen, Hagai Cohen, Sidney R. Cohen, Sergey Khodorov, Yishay Feldman, Anna Kossoy, Ifat Kaplan-Ashiri, Anatoly Frenkel, Ellen Wachtel, Igor Lubomirsky and David Ehre is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third-party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit https://creativecommons.org/licenses/by/4.0/.

1Peak Force Tapping® is a registered trademark of Bruker Corporation.