ARROW SILICON SPM-SENSORS (NON-CONTACT)
ARROW NC for non-contact/tapping mode available from December 2002: resonance frequency = 250kHz, force constant = 42 N/m cantilever length = 160µm, cantilever width (rectangular part) = 45µm
General
- SPM probe for high resolution imaging
- fits to all well-known commercial SPMs
- cantilever and tip are supported by a single crystal silicon holder (monolithic design)
Material Features
- highly doped, single crystal silicon (resistivity 0.01 – 0.025 Ohm*cm)
- no intrinsic stress and absolutely straight cantilevers
Cantilever
- rectangular cantilever with triangular free end
- easy positioning of tip on the area of interest due to the “ARROW” shape and consistent distance between tip and cantilever end
- trapezoidal cross section with wide detector side for easy laser adjustment
Holder
- dimensions of the holder are very reproducible (1.6 mm x 3.4 mm)
- replacement of probe without major readjustment of the detector system
Tip
- tip height 10 – 15µm and radius of curvature typically < 10nm (15nm guaranteed)
- macroscopic half cone angles 20° to 25° from the front and 30° to 35° when viewed along the cantilever axis
Types, Package sizes and Availability
- ARROW NC for non-contact/tapping mode available from December 2002: resonance frequency = 250kHz, force constant = 42 N/m cantilever length = 160µm, cantilever width (rectangular part) = 45µm
- small packages of 10, 20 and 50 probes
- contact mode and force modulation mode probes will be introduced in 2003