Author: NanoWorld

Tilt Compensated High Aspect Ratio Tip AR5T

Our Tilt Compensated High Aspect Ratio Tip (AR5T) is similar to our High Aspect Ratio Tip (AR5). However, the high aspect ratio portion of the tip is tilted 13° with respect to the center axis of the tip. This compensates the tilt angle of the cantilever.

Pointprobe High Aspect RatioThis compensates the tilt angle of the cantilever that results from mounting the probe to the AFM head. This unique feature allows absolutely symmetrical imaging of near-vertical sidewalls. Therefore these tips can be perfectly used to characterize to slope of steep sidewalls.

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High Aspect Ratio Tip AR10

For measurements on samples with sidewall angles approaching 90°, e.g. deep trench measurements or other semiconductor applications, we offer two different types of high aspect ratio tips showing near-vertical sidewalls

High Aspect Ratio Tip AR10The high aspect ratio tips are fabricated on the base of the well-established Pointprobe® probes. Thus the geometry of holder and cantilever is equal to that of the Pointprobe® probes.

The mechanical properties of the cantilevers are described in the following product descriptions for each High Aspect Ratio Tip probe respectively. The probes’ properties are enhanced by the high aspect ratio tip shape. Continue reading High Aspect Ratio Tip AR10